SERIS

This multichamber physical vapour deposition (PVD) sputtering platform is designed to handle silicon wafers and glass panes. The SV-540 is a state-of-the-art machine having dedicated chambers for the sputtering of metallic, dielectric and TCO/TMO layers. The processing chambers are equipped with planar magnetron sources for DC sputtering of metals, oxides and oxynitrides in the reactive mode, and with a cylindrical dual-magnetron source and planar sources for pulsed DC sputtering of dielectrics and TCOs/TMOs, with substrate heating up to 500 degree Celsius….

This photoluminescence imaging tool can perform luminescence study of silicon solar cells and wafers. It gives visual information about the defects on the sample….

This inline sputtering tool from FHR Anlagenbau, Germany has three planar magnetron sources, whereby two sources are connected to a DC power supply for DC sputtering of metal layers, while the third source is connected to an RF power supply for the deposition of dielectric films….

Used for the automatic soldering of metal ribbons onto solar cells and interconnecting solar cells into strings. SERIS’ customised TT1800 stringer is capable of interconnecting standard silicon solar cells with up to 6 busbars as well as interdigitated-back-contact solar cells. Both full-size cells and half-cut cells can be processed….

This advanced tool uses thermally induced mechanical stress to separate brittle semiconductor materials like silicon wafers. As opposed to conventional laser cutting, no bulging and no formation of particles occur, because the substrate is merely heated and not vaporised. The mechanical stability of TLS-processed solar cells is significantly greater than conventionally processed solar cells….