CryoTEM Krios G4 is the latest and most advanced CryoTEM commissioned and opened in 2025. It’s equipped with cold-FEG, Panther STEM detector, EMPAD, CetaD camera and Selectris Energy filter with Falcon4i electron direct detector….
*High-End Equipment
Ultrawide FoV Atom Probe Tomography
The APT device enables near-atomic level resolution (~0.2 nm depth & ~0.4 nm lateral) and 3D compositional mapping with high chemical sensitivity (<5 appm) by field evaporation and time-of-flight mass spectrometry. ...
X-ray Reflectometry and Diffractometry (XDD) Beamline
XDD beam line and its experimental station are designed for a general purpose of diffractometry, fluorescence detection and absorption spectroscopy, which will serve the research and development with structural determination, characterization and process monitoring in universities, institutes and industry in Singapore and the region….
X-ray Photoelectron Spectroscopy
Our most advanced XPS AXIS Supra+ provides a range of applications for surface science analysis. It comes with a heat and cool accessories that allow samples mounted on the sample holder to be heated up to +800°C or cooled to <100°C within the Flexi-lock and/or Sample Analysis Chamber....
Clinical PET-CT System
High-definition positron emission tomography (HD-PET) scanner combined with a 128 slices Computed tomography (CT) scanner for high resolution anatomical co-registration. The 78 cm bore opening allows for the scanning of large subjects with a uniform resolution of the PET images of 2 mm….
Inline Multi-Chamber Magnetron Sputter Deposition
This multichamber physical vapour deposition (PVD) sputtering platform is designed to handle silicon wafers and glass panes. The SV-540 is a state-of-the-art machine having dedicated chambers for the sputtering of metallic, dielectric and TCO/TMO layers. The processing chambers are equipped with planar magnetron sources for DC sputtering of metals, oxides and oxynitrides in the reactive mode, and with a cylindrical dual-magnetron source and planar sources for pulsed DC sputtering of dielectrics and TCOs/TMOs, with substrate heating up to 500 degree Celsius….
Photo and Electroluminescence Imaging System
This photoluminescence imaging tool can perform luminescence study of silicon solar cells and wafers. It gives visual information about the defects on the sample….
High Precision Large Area Solar Cell I-V Tester
LED I-V tester performs I-V measurement to determine the power conversion efficinecy of solar cell. It uses LED light enigne as light source, with illumination area of 16 cm x 16 cm. It is ideal for performing measurement of 5 busbar M2 sized solar cell….
Inline Magnetron Sputter Deposition System
This inline sputtering tool from FHR Anlagenbau, Germany has three planar magnetron sources, whereby two sources are connected to a DC power supply for DC sputtering of metal layers, while the third source is connected to an RF power supply for the deposition of dielectric films….
TT1800 Stringer For 6-BB Cell Technology
Used for the automatic soldering of metal ribbons onto solar cells and interconnecting solar cells into strings. SERIS’ customised TT1800 stringer is capable of interconnecting standard silicon solar cells with up to 6 busbars as well as interdigitated-back-contact solar cells. Both full-size cells and half-cut cells can be processed….
SINS Extra Ultraviolet (EUV) Branch Beamline
Extra Ultraviolet (EUV) Branch Beamline is a second branch of the main SINS beamline. Its primary purpose is to measure the reflectivity of EUV optical components…
Soft X-ray-Ultraviolet (SUV) Beamline
The soft X-ray-ultraviolet (SUV) beamline is a state-of-the-art beamline producing photons with selective polarizations. It covers the photon energy range from soft X-ray to ultraviolet, which can be used for various advanced optical, spectroscopy and scattering measurements. This integrated characterization-and-growth facility aims to study and distinguish the interplay between spin, charge, orbital and lattice degrees of freedom of advanced materials from solid state physics to biological systems, with various forms, e.g. nanoparticle, ultrathin film to bulk….
Infrared Spectro/Microscopy (ISMI) Beamline
ISMI (Infrared Spectro/Microscopy) beamline provides a state-of-the-art Fourier Transform IR spectrometer and microscope to supply diffraction-limited spatial resolution to an ever-widening range of infrared spectroscopy experiments. Synchrotron based source provides a versatile infrared radiation that covers a spectral range from 10000 to 10 cm-1 and has considerable brightness advantages over conventional (thermal) IR sources enabling IR experiments with high resolution and studies of extremely small or diluted samples….
Confocal Microscope – LSM710
The LSM710 is a highly motorised confocal laser scanning microscope for multidimensional acquisition (xyzt in multiple channels). It is optimized for imaging of cells, tissues, and small organisms….
Surface, Interface and Nanostructure Science (SINS) Beamline
SINS facility uses a bending magnetic beamline to deliver photon with an energy range from 50-1200 eV for end-station to cover the K-edges of light elements (C, N, and O) and L-edges of transition metals, and M-edges of part of rare earth metals, with user selectable linear and circular polarization for soft x-ray photon. There are two measurement chambers (main chamber and XMCD chamber) in the end-station, which are designed for X-ray photoelectron spectroscopy (XPS), angle-resolved photoemission (ARPES), X-ray absorption spectroscopy (XAS), X-ray linear dichroism (XMLD) and X-ray magnetic circular dichroism (XMCD) experiments….
LSR Analyser Cambridge
This flow cytometry analyser is used to measure fluorescently tagged individual cells or particles with 5 lasers and 32 fluorescence detectors….
Series Laser Micro Machining System
This high end femto laser is used for precision cutting/drilling and ablating of materials by microns….
BD FACSAria Fusion Flow Cytometry System 5 Lasers
This flow cytometer cell sorter is used to measure fluorescently tagged individual cells or particles, followed by isolating these cells or particles based on the measurements….
Thermal Laser Separation Wafer Dicing Machine
This advanced tool uses thermally induced mechanical stress to separate brittle semiconductor materials like silicon wafers. As opposed to conventional laser cutting, no bulging and no formation of particles occur, because the substrate is merely heated and not vaporised. The mechanical stability of TLS-processed solar cells is significantly greater than conventionally processed solar cells….
Confocal Microscope – Nikon A1r
The A1r inverted is a highly motorised confocal laser scanning microscope for multidimensional acquisition (xyzt in multiple channels) of fixed samples….
Molecular Beam Epitaxy (MBE) System
The fully integrated MBE system allows deposition of hetero-structures and semiconductors. IV and II-VI group deposition chambers are integrated with transfer chamber and load lock. The system has 5 ports for each chamber….
SQUID (Superconducting QUantum Interference Device) Magnetometer
This equipment uses SQUID-based magnetometry / susceptibility to provide a stable magnetic field for material characterisation….
Tescan FIBSEM System
The FIBSEM system is used to capture the microstructure image of materials….
Hitachi Regulus FESEM w EDX
The FESEM system is used to capture the microstructure image of materials….
E-beam Lithography (Raith)
This is a fast, high-resolution, automated wafer and multi-sample exposures electron beam lithography tool….
Laser Writer System – TLG (Heidelberg)
Heidelberg DWL 66+ laserwriter is a high resolution pattern generator for direct writing and mask making….
ICP Etch Cluster with 3 Modules / Plasma
The 3-chamber-modules advanced dry etching cluster system is used for micro- and nanomachining of various materials, with 8” wafer size, 300 mm diameter alumina discharge chamber, up to 8 mass flow controlled gas lines for each module and a minimum base pressure of 1×10-6 torr….
AJA Metal & Dielectric Sputtering System
This system uses close proximity physical vapour deposition with magnetron technology. The target-to-substrate distance is adjustable between 50-100 mm. The system accepts 3” diameter target size, various sample sizes and a maximum of 8” wafer….
Etcher for Magnetic Materials – SCIA
The SCIA Coat 200 is designed for homogeneous coating of high precision optics such as X-ray mirrors and optical filters with the technology of Dual Ion Beam Deposition (DIBD). The system is also equipped with a RF350-e ion beam source for etching process….
Magnetic Annealing System
This system applies an external magnetic field during the annealing process, which serves as an effective process to enhance the performance of magnetic devices and materials….
Atomic Layer Deposition System (ALD)
This system is used for the atomic layer deposition (ALD) of metal nitrides, oxides and sulphides with thermal and plasma processes….
Mask Aligner MA8
The Mask Aligner 8 system is a precision photolithography tool used in the fabrication of microelectronic devices. It aligns a photomask with a substrate, typically a silicon wafer, and then exposes the substrate to ultraviolet (UV) light. This process transfers the mask’s pattern onto a light-sensitive photoresist layer on the substrate….
Scanning Electron Microscope with Lithography
Zeiss EVO 10 is a 3-in-1 tool, featuring EBL, FESEM and EDX functions within the same tool. At challenging imaging conditions, the electron emitter users benefit from up to 10 times more beam brightness, resulting in an enhanced image resolution and contract. The SmartEDX, which is designed to acquire spatially resolved elemental information from the sample surfaces, obtains its highest throughput at 129 keV energy resolution at typical SEM operating conditions….
Field Emission Scanning Electron Microscope
The FEI Verios 460 is one of the leading extreme high resolution SEM family. It provides sub-nanometer resolution from 1~30 keV and enhanced contract needed for precise measurements on materials in advanced semiconductor manufacturing and advanced materials science applications. Our system is equipped with various detectors (in-column detector, ICD for high resolution imaging, STEM detector for scanning transmission electron microscopy of thin membrane etc). It also possesses electron back scattered diffraction, EBSD for crystal orientation mapping….
Electron Beam Lithography System
The JEOL JBX-6300FS EBL is a high throughput system, running at 25 keV, 50 keV and 100 keV acceleration voltages. It has mulit cassette loader (up to 10 samples) and is able to process piece part samples and full 4 inches diameter substrates. The minimum linewidth achievable in our cleanroom environment is 12 nm with sticking accuracy of less than +/- 20 nm at 100 keV. It comes with Genisys-Beamer software to assist in high resolution patterning by proximity effects….
Clinical 3T MRI Scanner
The scanner is equipped with the 4th generation of TIM (Total Imaging Matrix), which provides up to 204 coils elements with up to 128 independent radiofrequency channels for fast and accurate imaging. Its 70 cm open bore makes it suitable for the imaging of large subjects. MRI provides the highest spatial resolution and unmatched soft tissue contrast….
Bruker Lightsheet
A lightsheet microscopy with dipping lens for fast fluorescence imaging with super resolution…
Clinical CT Scanner
The SOMATOM Definition Flash is a dual source, 256-slice CT, which allows for very fast acquisitions ideal for cardiac examinations. Contrast-enhanced CT angiography can be acquired using accurate bolus tracking techniques.
The system is also equipped with a fluoroscopy mode with up to 10 frames/sec for interventional CT scans….
High Content Cell Analysis System
This confocal spinning disk microscope has the capability to automatically acquire images in multiwell plates and slides. The automated acquisition advances the imaging process and allows the researcher to study their project in an impartial way. It is suited for wide variety of samples on the Phenix, e.g. single layer cell lines, multilayer neuronal cultures, tissue sections and organoids. The Phenix is equipped with CO2 and temperature control features, enabling the capture of live cell images and time courses. A plate handler and incubator allow the automated imaging of multiple plates….
High-plex, Multi-omics Spatial-RNA & Protein (GeoMx Digital Spatial Profiller)
This system allows profiling of RNA and protein expression from distinct tissue compartments and cell populations with an automated and scalable workflow that integrates with standard histology staining….
Confocal Microscope – Airy Scan LSM 880
LSM 880 is a motorised confocal laser scanning microscope for multidimensional acquisition (xyzt in multiple channels, tiles, FCS, FRAP) of live samples with super-resolution detection capability. Accomplished through its honeycomb 32 channel Airyscan GasPD, the system is able to increase spatial resolution 1.7x in each dimension (140 nm lateral and 400 nm axial resolution) and achieve 4x faster temporal super-resolution imaging, requiring 8x lower laser power while increasing the sensitivity. The system is especially suited for dynamic life cell imaging….
Quantitative Proteomics Core
The Quantitative Proteomics Core (QPC) at CSI Singapore, NUS, has a dedicated and experienced team supporting quantitative proteomics applications in biomedical research. We provide comprehensive end-to-end solutions for quantitative proteomics needs, from consultation to sample preparation, measurement, analysis, data storage, and data visualisation with in-house bioinformatics pipelines. Collaborators need to only focus on their experiments and pass their samples to us for processing. Contact us for discussion….
Confocal Microscope – Leica SP8
True spectral imaging with AOBS (acousto-optical programmable beam splitter) provides highest flexibility switching in microseconds prolong sample viability with low power lasers. Tandem scanner with resonance scanner allows ultrafast 420 frames/sec (at 512 x 16 scan format) that is up to 50% faster image acquisition. Highly sensitive HyD detector allows a reduction of light dosage delivered to the cells, reducing photo-toxicity, and for detection of very low signals. The 3D rendering and imaging processing tools provide superb 3D reconstruction and high-quality images for analysis and publication….
High Performance Fixed Alignment Cell Sorter
It is equipped with 5 air-cooled lasers and can perform up to 14 color flow cytometry analyses. It supports 2 and 4-way bulk sorting to tubes, as well as single-cell sorting to multi-well plates (ranging from 6 to 384 wells) or microscope slides.…
Deep Reactive Ion Etcher
The DRIE uses special gases for standard industry semiconductor etching purpose. It is able to etch the samples in 2 modes, Bosch (chiller mode) and the Cryo (liquid nitrogen mode which could go to sub 20°C). Apart from being able to etch silicon substrates, it could be used to etch oxides and nitrides and provide good selectivity. It is also equipped with a load-lock and the processes are automated and user-friendly….