Description
The ILS LT is an R&D laser processing workstation for high-precision applications in PV. This tool can be used for several process applications for making high-efficiency solar cells, including contact opening, selective mask processing or edge/junction isolation, wafer drilling, wafer cutting, silicon shadow mask fabrication and laser marking for substrate ID tracking purposes.
Technical Specifications
The machine features three laser sources to provide excellent flexibility:
• 2 W UV continuous source
• 20 W green ns source
• 30 W fs source that can be tuned to operate at either UV, green or IR wavelengths
This tool has automated handling for substrates up to M6 size and is also capable of larger wafers (up to G12 size) by manual handling.
Model
ILS LT 124
Manufacturer
Innolas Solutions, Germany
Application
• Laser scribing
• Edge isolation
Special Remarks
Booking system available for SERIS internal staff only.
Location
Solar Energy Research Institute of Singapore
College of Design and Engineering
E3A-02A
7 Engineering Drive 1
Singapore 117574
Booking Information
Charges: N/A
Service or Self-operated: Service required
Website for booking: N/A
Key Contact(s)
Ison Jeffrey Garcia
serijg@nus.edu.sg
Fabrication | Materials | SERIS | Equipment