Description
The APT device enables near-atomic level resolution (~0.2 nm depth & ~0.4 nm lateral) and 3D compositional mapping with high chemical sensitivity (<5 appm) by field evaporation and time-of-flight mass spectrometry.
Technical Specifications
Ultra-wide field of view (>250 nm), wider collection angle of ~120° with flat counter electrode
Long straight flight path (150 mm) & novel double einzel lensing for improved mass resolving power (MRP)
Symmetric dual-beam deep UV (257.5 nm wavelength) higher yield and greater analysis volume
High detection efficiency up to ~62% of all the ions leaving the tip
Live mass spectrum calibration and tip reconstruction for live identification of regions of interest
Fully automated data management, specimen aligning, laser scanning
Software: APSuite 6
Model
Invizo6000
Manufacturer
CAMECA
Application
Chemical and structure analysis at near-atomic resolution with 3D mapping capability
Special Remarks
Invizo6000 APT facility is under commissioning, and it will be open for internal/external users from Oct 2025
Designated operator for the equipment, no training service is provided currently
Location
University Electron Microscopy Centre, APT Facility
College of Design and Engineering
E7-01-01E
15 Kent Ridge Cres
Singapore 119276
Booking Information
Charges: To be determined at a later date
Service or Self-operated: Service required
Website for booking: Under construction
Key Contact(s)
Tan Xipeng
xptan@nus.edu.sg
Jonathan Aristya Setyadji
jo01ji@nus.edu.sg
CDE | Characterisation | Analysis | Materials | Equipment