Description
The SCT Thermal Evaporator is a lab-scale tool for depositing metal and other functional thin films (Al, Ag, etc) onto various substrates (silicon wafers, glass sheets, etc). The deposition chamber uses a cryogenic pump and can achieve very low pressure (< 10-6 Torr), ensuring high-purity metal films. The evaporator features dual resistively heated sources and a rotating substrate table to ensure uniform depositions across large-area substrates.
Technical Specifications
Available materials: Ag and Al
Max. substrate size: 30 cm x 40 cm
Substrate temperature: Room temp (NO heating available)
Model
Orion (box type) Thermal Evaporator
Manufacturer
System Control Technologies (SCT), USA
Application
Thin film deposition by thermal evaporation method
Special Remarks
Booking system available for SERIS internal staff only.
Location
Solar Energy Research Institute of Singapore
College of Design and Engineering
E3A-2B
7 Engineering Drive 1
Singapore 117574
Booking Information
Charges: N/A
Service or Self-operated: Self-operated
Website for booking: N/A
Key Contact(s)
Selvaraj Venkataraj
serselva@nus.edu.sg
Material Synthesis and Deposition | Materials | SERIS | Equipment