Description
AFM utilises imaging techniques for surface analysis. It allows accurate and non-destructive measurements of the topography, electrical, and magnetic properties of a sample surface with high resolution.
Technical Specifications
Use SmartScan™ software
XY scan range: 100 µm × 100 µm (typical)
Z scan range: 15 µm
Sample size: Up to 6″ wafers, < 500g
Scanning modes: True Non-Contact, Contact, Tapping, Conductive, MFM, Enhanced EFM (PFM, SKPM), etc.
Model
NX20
Manufacturer
Park Systems
Application
Imaging and characterisation
Special Remarks
Training is required – https://cde.nus.edu.sg/e6nanofab/what-we-offer/
Already open to External = NTU, SUTD and other higher learning institutions, A*STAR and DSO.
Location
E6NanoFab
College of Design and Engineering
Level 1 Class 100 Cleanroom
5 Engineering Drive 1, Singapore 117608
Booking Information
Charges: https://cde.nus.edu.sg/e6nanofab/wp-content/uploads/2023/05/20230501_Web-Published-Price-List.pdf
Service or Self-operated: Self-operated
Website for booking: https://cde.nus.edu.sg/e6nanofab/atomic-force-microscopy-afm/
Key Contact(s)
Loh Fong Leong
lohfl@nus.edu.sg
CDE | Characterisation | Analysis | Imaging | Materials | Equipment