Description
The FESEM system is used to capture the microstructure image of materials.
Technical Specifications
Magnification: x20 to 1M
Acceleration voltage: 0.5 to 30 kV
Probe current: up to 20 nA
5-axes motorized eucentric specimen stage (X,Y: 50 mm, Z: 30 mm, T: -5° to 70°, R: -360°)
Model
Regulus 8100
Manufacturer
Hitachi High-Tech Corporation
Application
Field emission scanning electron microscope
Special Remarks
Training is required – https://cde.nus.edu.sg/e6nanofab/what-we-offer/
Already open to External = NTU, SUTD and other higher learning institutions, A*STAR and DSO.
Location
E6NanoFab
College of Design and Engineering
Level 1 Class 1000 Cleanroom
5 Engineering Drive 1, Singapore 117608
Booking Information
Charges: https://cde.nus.edu.sg/e6nanofab/wp-content/uploads/2023/05/20230501_Web-Published-Price-List.pdf
Service or Self-operated: Self-operated
Website for booking: https://cde.nus.edu.sg/e6nanofab/fe-sem-ultra-high-resolution-cleanroom/
Key Contact(s)
Linn Linn
e6nanofab@nus.edu.sg
CDE | Characterisation | Analysis | Imaging | Materials | Equipment