Description
The FEI Verios 460 is one of the leading extreme high resolution SEM family. It provides sub-nanometer resolution from 1~30 keV and enhanced contract needed for precise measurements on materials in advanced semiconductor manufacturing and advanced materials science applications. Our system is equipped with various detectors (in-column detector, ICD for high resolution imaging, STEM detector for scanning transmission electron microscopy of thin membrane etc). It also possesses electron back scattered diffraction, EBSD for crystal orientation mapping.
Technical Specifications
N/A
Model
Veros 460
Manufacturer
FEI
Application
High resolution electron microscopy (with EBSD for crystal orientation mapping)
Special Remarks
Cleanroom class 100 and class 1000
Location
Centre for Advanced 2D Materials (CA2DM)
NUS Science S14-01-03
6 Science Drive 2, Singapore 117546
Booking Information
Charges: N/A
Service or Self-operated: Self-operated
Website for booking: https://graphene.nus.edu.sg/our-solutions/tools-usage/
Key Contact(s)
Ang Han Siong
c2dahs@nus.edu.sg
CA2DM | Characterisation | Analysis | Imaging | Materials | Equipment