ESCA System

Description
For department/faculty use only.

This UHV Vacuum Generators ESCALAB Mk2 system has upgraded with Omicron 7-Channeltron analyser with XPS, UPS and mono-XPS in one analysis chamber and a deposition (SIMS being replaced) chamber in the other.

Technical Specifications
Analyser:
• Omicron EA125 U7 hemispherical electron spectrometer with 7-channel detection installed on the VG Scientific ESCALab Mark 2 chamber
• Pass energy: Constant analyser energy
• Pass energy: 20 eV or 50 eV
• Emission angle: 15°
• Entrance and exit slits: Maximum
• Detection is about 1.5 mm if magnification is high (default) or 3 mm if magnification is medium
• FWHM: 1.0 eV or 1.6 eV
• Depth detection range: ~10 nm (surface analysis)

X-ray gun:
• Omicron twin anode X-ray Mg (default)/Al source
• 300 W (15 kV x 20 mA)
• Beam spot size >=10 mm

Model
Omicron EA125 U7

Manufacturer
NA

Application
XPS, UPS, Sputtering

Special Remarks
Internal Department/Faculty use only. Training required before self-operation

Location
Physics, SSL Lab
NUS Science S13-01-07
Science Drive 2, Singapore 117543

Booking Information
Charges: Yes, no available published rates
Service or Self-operated: Both
Website for booking: Available only for Department/Faculty and affiliates

Key Contact(s)
Tan Jyh Harng
jh_tan@nus.edu.sg


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