Description
The AJA electron beam evaporator system is equipped with 6x 15cc crucibles for depositing 6 materials within the same load-lock system.
Technical Specifications
N/A
Model
Ebeam
Manufacturer
AJA International, Inc
Application
Thin film deposition (Mo, Co, Pd, Cr, SiO2, Ti, Pt, Al, Ag)
Special Remarks
Cleanroom class 100 and class 1000
Location
Centre for Advanced 2D Materials (CA2DM)
NUS Science S14-01-02
6 Science Drive 2, Singapore 117546
Booking Information
Charges: N/A
Service or Self-operated: Self-operated
Website for booking: https://graphene.nus.edu.sg/our-solutions/tools-usage/
Key Contact(s)
Ang Han Siong
c2dahs@nus.edu.sg
CA2DM | Fabrication | Materials | Equipment