Description
For department/faculty use only.
Coating of non-conductive sample with platinum
Technical Specifications
Sputtering method: Magnetron type
Operating pressure: ~10 to 1 Pa
Sputtering current: 10, 20, 30, 40 mA
Target: Platinum (Pt) standard
Sample stage: 64 mm diameter
Sample stage position: Variable (30 to 40 mm)
Vacuum chamber: 120 mm x 100 mm height, made of glass
Vacuum monitor: Pirani vacuum gauge (also used to display sputtering current)
Timer: Digital display (1 to 300 seconds)
Gas inlet valve: Embedded
Argon gas barge function: Embedded
High voltage safety circuit: Embedded
Exhaust system: Direct-coupled rotary pump 30 L/min
Model
JFC-1600
Manufacturer
JEOL Ltd.
Application
Sample coating
Special Remarks
Internal Department/Faculty use only. Training required before self-operation
Location
Physics, FESEM Lab
NUS Science S13-01-02
Science Drive 2, Singapore 117543
Booking Information
Charges: Yes, no available published rates
Service or Self-operated: Both
Website for booking: Available only for Department/Faculty and affiliates
Key Contact(s)
Tan Jyh Harng
jh_tan@nus.edu.sg
Chemistry | Physics | FOS | Sample Preparation | Equipment